WF-100
The Instrumented Wafer (Thermocouples, Bonded Wafer or RTDs) finds application in semiconductor processing equipment where knowing and controlling the temperature at the surface of a wafer is critical.
Standard temperature range of RTD Wafer Sensor is from -200~240 ℃. With the accuracy of +/- 0.5 ℃ at 0 ℃, it can be installed in critical fab equipment. Surface mount has a temperature range of -150 to 700 ℃ and high temperature design can operate between -150 to 1,200 ℃.
Wafer Sensors
For Critical Temperature Control.
See What Sets Us Apart
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Industry standard calibration and testing for higher accuracy
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High sensitivity to temperature changes
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To support variety of application while maintaining accuracy
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Silicon, Glass, Ceramic etc.
Technical Specifications
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RTD -Thin Film Platnium
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1000 Ω nominal at 0°C
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RTD- Up to 400mm
Surface Mount -Up to 40ft. (more options available)
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RTD -40 AWG
Surface Mount - 20-40 AWG
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RTD -Polymide coated leads
Surface Mount -Quartz, Teflon, Silica, Ceramic, Polymide